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                                 UNITED STATES
                       SECURITIES AND EXCHANGE COMMISSION
                             WASHINGTON, DC 20549

                                  SCHEDULE 13G

                    UNDER THE SECURITIES EXCHANGE ACT OF 1934
                               (AMENDMENT NO. 3)*

                             Metron Technology N.V.
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                                (Name of Issuer)

                                 Common Shares
--------------------------------------------------------------------------------
                         (Title of Class of Securities)

                                  N5665B-10-5
--------------------------------------------------------------------------------
                                 (CUSIP Number)

                               December 31, 2002
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            (Date of Event Which Requires Filing of this Statement)

         Check the appropriate box to designate the rule pursuant to which this
Schedule is filed:

                  [ ]    Rule 13d-1(b)

                  [ ]    Rule 13d-1(c)

                  [X]    Rule 13d-1(d)

*The remainder of this cover page shall be filled out for a reporting person's
initial filing on this form with respect to the subject class of securities, and
for any subsequent amendment containing information which would alter the
disclosures provided in a prior cover page.

The information required in the remainder of this cover page shall not be deemed
to be "filed" for the purpose of Section 18 of the Securities Exchange Act of
1934 ("Act") or otherwise subject to the liabilities of that section of the Act
but shall be subject to all other provisions of the Act (however, see the
Notes).


PERSONS WHO RESPOND TO THE COLLECTION OF INFORMATION CONTAINED IN THIS FORM ARE
NOT REQUIRED TO RESPOND UNLESS THE FORM DISPLAYS A CURRENTLY VALID OMB CONTROL
NUMBER.

SEC 1745 (12-02)



CUSIP NO. N5665B-10-5                   13G                    PAGE 2 OF 5 PAGES
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  1.    Names of Reporting Persons.
        I.R.S. Identification Nos. of above persons (entities only).

        FSI International, Inc.                                       41-1223238
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  2.    Check the Appropriate Box if a Member of a Group (See Instructions)
        (a) [ ]
               -----------------------------------------------------------------
        (b) [ ]
               -----------------------------------------------------------------
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  3.    SEC Use Only


--------------------------------------------------------------------------------
  4.    Citizenship or Place of Organization

        Minnesota
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     Number of             5.      Sole Voting Power

      Shares                       2,718,813
                           -----------------------------------------------------
   Beneficially            6.      Shared Voting Power

     Owned by                      0
                           -----------------------------------------------------
       Each                7.      Sole Dispositive Power

     Reporting                     2,178,813
                           -----------------------------------------------------
   Person With:            8.      Shared Dispositive Power

                                   0
--------------------------------------------------------------------------------
  9.    Aggregate Amount Beneficially Owned by Each Reporting Person

        2,718,813*
--------------------------------------------------------------------------------
 10.    Check if the Aggregate Amount in Row (9) Excludes Certain Shares
        (See Instructions)


--------------------------------------------------------------------------------
 11.    Percent of Class Represented by Amount in Row (9)

        20.7%
--------------------------------------------------------------------------------
 12.    Type of Reporting Person (See Instructions)

        CO
--------------------------------------------------------------------------------

--------------------------------------------------------------------------------
*  Includes 28,126 shares issuable to Joel A. Elftmann pursuant to options
--------------------------------------------------------------------------------
   exercisable within 60 days of December 31, 2002. Mr. Elftmann has assigned
--------------------------------------------------------------------------------
   such options to FSI International, Inc.
--------------------------------------------------------------------------------

--------------------------------------------------------------------------------






CUSIP NO. N5665B-10-5                   13G                    PAGE 3 OF 5 PAGES
--------------------------------------------------------------------------------

Item 1.             (a)        Name of Issuer:  Metron Technology N.V.

                    (b)        Address of Issuer's Principal Executive Offices:

                               1350 Old Bayshore Highway, Burlingame, CA  94010

Item 2.             (a)        Name of Person Filing:  FSI International, Inc.

                    (b)        Address of Principal Business Office or, if none,
                               Residence:

                               3455 Lyman Boulevard, Chaska, MN  55318

                    (c)        Citizenship:  Minnesota

                    (d)        Title of Class of Securities:  Common Shares

                    (e)        CUSIP Number:  N5665B-10-5

Item 3.             If this statement is filed pursuant to Section
                    240.13d-1(b) or 240.13d-2(b) or (c), check whether the
                    person filing is a:

                             Not Applicable

                    (a)     [   ]    Broker or dealer registered under Section
                                     15 of the Act.

                    (b)     [   ]    Bank as defined in Section 3(a)(6) of the
                                     Act.

                    (c)     [   ]    Insurance company as defined in Section
                                     3(a)(19) of the Act

                    (d)     [   ]    Investment company registered under Section
                                     8 of the Investment Company Act of 1940.

                    (e)     [   ]    An investment adviser in accordance with
                                        Section 240.13d-1(b)(1)(ii)(E).

                    (f)     [   ]    An employee benefit plan or endowment fund
                                     in accordance with Section 240.13d-1(b)(1)
                                     (ii)(F).

                    (g)     [   ]    A parent holding company or control person
                                     in accordance with Section 240.13d-1(b)(1)
                                     (ii)(G).

                    (h)     [   ]    A savings association as defined in Section
                                     3(b) of the Federal Deposit Insurance Act.





CUSIP NO. N5665B-10-5                   13G                    PAGE 4 OF 5 PAGES
--------------------------------------------------------------------------------

                    (i)     [   ]    A church plan that is excluded from the
                                     definition of an investment company under
                                     Section 3(c)(14) of the Investment Company
                                     Act of 1940.

                    (j)     [   ]    Group, in accordance with Section
                                     240.13d-1(b)(1)(ii)(J).

Item 4.             Ownership

                    (a)        Amount Beneficially Owned:  2,718,813, including
                               28,126 shares issuable to Joel A. Elftmann
                               pursuant to options exercisable within 60 days of
                               December 31, 2002.  Mr. Elftmann has assigned
                               such options to FSI International, Inc.

                    (b)        Percent of Class:  20.7%

                    (c)        Number of shares as to which such person has:

                                 (i)       Sole power to vote or to direct the
                                           vote:  2,718,813

                                (ii)       Shared power to vote or to direct the
                                           vote:  -0-

                               (iii)       Sole power to dispose or to direct
                                           the disposition of:  2,718,813

                               (iv)        Shared power to dispose or to direct
                                           the disposition of:  -0-

Item 5.             Ownership of Five Percent or Less of a Class

                    If this statement is being filed to report the fact that as
                    of the date hereof the reporting person has ceased to be the
                    beneficial owner of more than five percent of the class of
                    securities, check the following [ ].

Item 6.             Ownership of More than Five Percent on Behalf of Another
                    Person
                             Not Applicable

Item 7.             Identification and Classification of the Subsidiary Which
                    Acquired the Security Being Reported on By the Parent
                    Holding Company
                             Not Applicable

Item 8.             Identification and Classification of Members of the Group
                             Not Applicable

Item 9.             Notice of Dissolution of Group
                             Not Applicable





CUSIP NO. N5665B-10-5                   13G                    PAGE 5 OF 5 PAGES
--------------------------------------------------------------------------------

Item 10.            Certification
                             Not Applicable


                                    SIGNATURE

         After reasonable inquiry and to the best of my knowledge and belief, I
certify that the information set forth in this statement is true, complete and
correct.

                                                     January 22, 2003
                                            ------------------------------------
                                                           Date


                                                 FSI INTERNATIONAL, INC.

                                               BY: /s/ Patricia M. Hollister
                                            ------------------------------------
                                                         Signature

                                                   Patricia M. Hollister
                                                  Chief Financial Officer
                                            ------------------------------------
                                                        Name/Title