As filed with the Securities and Exchange Commission on May 13, 2002
                                                          Registration No.  333-


                       SECURITIES AND EXCHANGE COMMISSION

                             WASHINGTON, D.C. 20549

                                    FORM S-8

                             REGISTRATION STATEMENT

                                    UNDER THE

                             SECURITIES ACT OF 1933

                             BROOKS AUTOMATION, INC.

             (Exact Name of Registrant as Specified in Its Charter)

                  DELAWARE                     04-3040660

              (State or Other               (I.R.S. Employer
              Jurisdiction of            Identification Number)
              Incorporation or
               Organization)

                    15 ELIZABETH DRIVE, CHELMSFORD, MA 01824

               (Address of Principal Executive Offices) (Zip Code)

                             BROOKS AUTOMATION, INC.
                       2000 COMBINATION STOCK OPTION PLAN

                            (Full Title of the Plan)

            ROBERT J. THERRIEN, PRESIDENT AND CHIEF EXECUTIVE OFFICER
                             BROOKS AUTOMATION, INC.
                               15 ELIZABETH DRIVE
                              CHELMSFORD, MA 01824

                     (Name and Address of Agent For Service)

                                 (978) 262-2400

          (Telephone Number, Including Area Code, of Agent For Service)

                         CALCULATION OF REGISTRATION FEE



                                Proposed   Proposed
Title                           Maximum    Maximum
of Each          Amount         Offering   Aggregate               Amount of
Class of         to be          Price Per  Offering                Registration fee
Securities       Registered     Unit(1)    Price(1)
to be            ----------     -------    --------                ----------------
Registered
----------
                                                        
Common           5,000,000      $ 32.49    $162,450,000.00          $ 14,945.40
Stock, $.01      shares(2)
par value

Preferred        5,000,000
Share
Purchase
Rights (3)


This Registration Statement relates to the registration of additional securities
of the same class as other securities for which a registration statement on this
form relating to an employee benefit plan is effective. Pursuant to General
Instruction E of Form S-8, this registration statement incorporates by reference
Registrant's registration statement filed on Form S-8 Registration No.
333-40842, relating to an aggregate of 1,000,000 shares issuable under the
Registrant's 2000 Combination Stock Option Plan.

(1) Estimated solely for the purpose of determining the registration fee
    pursuant to Rule 457(h) under the Securities Act of 1933, on the basis of
    the average high and low prices for the Registrant's common stock on the
    Nasdaq National Market on May 7, 2002.

(2) Such presently indeterminable number of additional shares of common stock
    are registered hereunder as may be issued in the event of a merger,
    consolidation, reorganization, recapitalization, stock dividend, stock
    split, stock combination, or other similar changes in the common stock.

(3) On July 23, 1997, the Board of Directors of the Registrant declared a
    dividend of one preferred share purchase right for each share of common
    stock outstanding on August 21, 1997. The 5,000,000 rights registered by
    this Registration Statement represent one right that may be issued in
    connection with each share of common stock issuable upon exercise of options
    granted or to be granted under the Registrant's 2000 Combination Stock
    Option Plan. Such presently indeterminable number of rights are also
    registered by this Registration Statement as may be issued in the event of a
    merger, consolidation, reorganization, recapitalization, stock dividend,
    stock split or other similar change in common stock. The rights are not
    separately transferable apart from the common stock, nor are they
    exercisable until the occurrence of certain events. Accordingly, no
    independent value has been attributed to the rights.

                                     PART II

               INFORMATION REQUIRED IN THE REGISTRATION STATEMENT

ITEM 8.  EXHIBITS.



Exhibit No.                       Description                       Reference
-----------                       -----------                       ---------
                                                              
    4.01      Specimen Certificate for shares of the Registrants         A*
              common stock.

    4.02      Description of Capital Stock.                            B*, C*

    4.03      Rights Agreement, dated July 23, 1997.                   C*, D*

    4.04      Amendment to the Rights Agreement between the              D*
              Registrant and Equiserve Trust Company, N.A. as
              Rights Agent.

    4.05      Registration Rights Agreement dated January 6, 2000.       D*

    4.06      Shareholders Agreement dated January 6, 2000 by and        E*
              among the Registrant, Daifuku America Corporation and
              Daifuku Co., Ltd.

    4.07      Stockholders Agreements dated September 30, 1999 by        E*
              and among the Registrant, Jenoptik AG, M+W Zander
              Holding GmbH and Robert J. Therrien.

    4.08      Indenture dated as of May 23, 2001 between the             F*
              Registrant and State Street Bank and Trust Company
              (as Trustee).

    4.09      Registration Rights Agreement dated May 23, 2001           F*
              among the Registrant and Credit Suisse First Boston
              Corporation and SG Cowen Securities Corporation (as
              representatives of several purchasers).

    4.10      Form of 4.75% Convertible Subordinated Note of the         F*
              Registrant in the principal amount of $175,000,000
              dated as May 23, 2001.

    4.11      Stock Purchase Agreement dated June 20, 2001 relating      G*
              to the acquisition of CCS Technology, Inc. by the
              Registrant.

    4.12      Asset Purchase Agreement dated February 15, 2002           H*
              relating to the acquisition of substantially all of
              the assets of Intelligent Automation Systems, Inc.,
              Intelligent Automation Systems, Inc. Trust and IAS
              Products, Inc. by the Registrant.

    4.13      Form of Certificate of Designations, Preferences,          I*
              Rights and Limitations of Special Voting Preferred
              Stock of the Registrant.

    5.01      Legal Opinion of Brown Rudnick Berlack Israels LLP.       Filed
                                                                      herewith

    23.01     Consent of PricewaterhouseCoopers LLP (Independent        Filed
              Accountants for the Registrant).                        herewith

    23.02     Consent of Ernst & Young LLP, Independent Auditors.       Filed
                                                                      herewith

    23.03     Consent of PricewaterhouseCoopers LLP (Independent        Filed
              Accountants for General Precision, Inc.).               herewith

    23.04     Consent of Brown Rudnick Berlack Israels LLP              Filed
              (included in its legal opinion filed as Exhibit 5.01    herewith
              to this Registration Statement).

    24.01     Power of Attorney (included on the signature page of      Filed
              this Registration Statement).                           herewith

    99.04     Registrant's 2000 Combination Stock Option Plan, as       Filed
              amended.                                                herewith


-----------
A.    Incorporated by reference to the Registrant's registration statement on
      Form S-1 (Registration No. 333-87296) filed on December 13, 1994.

B.    Incorporated by reference to the Registrant's Form 8-A filed on January
      27, 1995.

C.    Incorporated by reference to the Registrant's Form 8-A filed on August 7,
      1997.

D.    Incorporated by reference to the Registrant's annual report on Form 10-K
      filed on December 13, 2001 for the fiscal year ending September 30, 2001.

E.    Incorporated by reference to the Registrant's current report on Form 8-K
      filed on January 19, 2000 and amended on February 14, 2000.

F.    Incorporated by reference to the Registrant's current report on Form 8-K
      filed on May 29, 2001.

G.    Incorporated by reference to the Registrant's registration statement on
      Form S-8 (Registration No. 333-67432) filed on August 13, 2001.

H.    Incorporated by reference to the Registrant's current report on Form 8-K
      filed on March 1, 2002.

I.    Incorporated by reference to the Registrant's registration statement on
      Form S-3/A filed on May 13, 2002.

* In accordance with Rule 12b-32 under the Securities Exchange Act of 1934, as
amended, reference is made to the documents previously filed with the Securities
and Exchange Commission, which documents are hereby incorporated by reference.

                                   SIGNATURES

      Pursuant to the requirements of the Securities Act of 1933, the Registrant
certifies that it has reasonable grounds to believe that it meets all of the
requirements for filing on Form S-8 and has duly caused this registration
statement to be signed on its behalf by the undersigned, thereunto duly
authorized, in the Town of Chelmsford, Commonwealth of Massachusetts, on the
13th day of May, 2002.

                                    BROOKS AUTOMATION, INC.

                                    By: /s/ Robert J. Therrien
                                       ----------------------------------------
                                       Robert J. Therrien
                                       Chief Executive Officer and President

                                POWER OF ATTORNEY

      KNOW ALL MEN BY THESE PRESENTS, that the person whose signature appears
below constitutes and appoints Robert J. Therrien and Ellen B. Richstone, and
each of them (with full power to each of them to act alone), his or her true and
lawful attorneys-in-fact and agents, with full power of substitution and
resubstitution, for him or her and in his or her name, place and stead, in any
and all capacities, to sign any or all amendments (including post-effective
amendments) to this Registration Statement, and to file the same, with all
exhibits thereto and other documents in connection therewith, with the
Securities and Exchange Commission, granting unto said attorneys-in-fact and
agents, and each of them, full power and authority to do and perform each and
every act and thing requisite and necessary to be done in and about the
premises, as fully to all intents and purposes as he or she might or could do in
person, hereby ratifying and confirming all that said attorneys-in-fact and
agents, or any of them, or their substitutes, may lawfully do or cause to be
done by virtue hereof.

      Pursuant to the requirements of the Securities Act of 1933, this
registration statement has been signed by the following persons in the
capacities and on the date indicated.



Signature                        Title                  Date

                                                  
/s/ Robert J. Therrien           Director, Chief        May 13, 2002
-----------------------          Executive Officer and
Robert J. Therrien               President (Principal
                                 Executive Officer)


/s/ Ellen B. Richstone           Senior Vice President  May 13, 2002
-----------------------          Finance and
Ellen B. Richstone               Administration and
                                 Chief Financial
                                 Officer (Principal
                                 Financial Officer)


/s/ Steven E. Hebert             Principal Accounting   May 13, 2002
-----------------------          Officer
Steven E. Hebert


/s/ Roger D. Emerick             Director               May 13, 2002
-----------------------
Roger D. Emerick


/s/ Amin J. Khoury               Director               May 13, 2002
-----------------------
Amin J. Khoury


/s/ Juergen Giessmann            Director               May 13, 2002
-----------------------
Juergen Giessmann


/s/ Joseph Martin                Director               May 13, 2002
------------------------
Joseph Martin


                                INDEX TO EXHIBITS



Exhibit No.                    Description                         Reference
-----------                    -----------                         ---------

                                                             
    4.01      Specimen Certificate for shares of the Registrants         A*
              common stock.

    4.02      Description of Capital Stock.                            B*, C*

    4.03      Rights Agreement, dated July 23, 1997.                   C*, D*

    4.04      Amendment to the Rights Agreement between the              D*
              Registrant and Equiserve Trust Company, N.A. as
              Rights Agent.

    4.05      Registration Rights Agreement dated January 6, 2000.       D*

    4.06      Shareholders Agreement dated January 6, 2000 by and        E*
              among the Registrant, Daifuku America Corporation and
              Daifuku Co., Ltd.

    4.07      Stockholders Agreements dated September 30, 1999 by        E*
              and among the Registrant, Jenoptik AG, M+W Zander
              Holding GmbH and Robert J. Therrien.

    4.08      Indenture dated as of May 23, 2001 between the             F*
              Registrant and State Street Bank and Trust Company
              (as Trustee).

    4.09      Registration Rights Agreement dated May 23, 2001           F*
              among the Registrant and Credit Suisse First Boston
              Corporation and SG Cowen Securities Corporation (as
              representatives of several purchasers).

    4.10      Form of 4.75% Convertible Subordinated Note of the         F*
              Registrant in the principal amount of $175,000,000
              dated as May 23, 2001.

    4.11      Stock Purchase Agreement dated June 20, 2001 relating      G*
              to the acquisition of CCS Technology, Inc. by the
              Registrant.

    4.12      Asset Purchase Agreement dated February 15, 2002           H*
              relating to the acquisition of substantially all of
              the assets of Intelligent Automation Systems, Inc.,
              Intelligent Automation Systems, Inc. Trust and IAS
              Products, Inc. by the Registrant.

    4.13      Form of Certificate of Designations, Preferences,          I*
              Rights and Limitations of Special Voting Preferred
              Stock of the Registrant.

    5.01      Legal Opinion of Brown Rudnick Berlack Israels LLP.       Filed
                                                                      herewith

    23.01     Consent of PricewaterhouseCoopers LLP (Independent        Filed
              Accountants for the Registrant).                        herewith

    23.02     Consent of Ernst & Young LLP, Independent Auditors.       Filed
                                                                      herewith

    23.03     Consent of PricewaterhouseCoopers LLP (Independent        Filed
              Accountants for General Precision, Inc.).               herewith

    23.04     Consent of Brown Rudnick Berlack Israels LLP              Filed
              (included in its legal opinion filed as Exhibit 5.01    herewith
              to this Registration Statement).

    24.01     Power of Attorney (included on the signature page of      Filed
              this Registration Statement).                           herewith

    99.04     Registrant's 2000 Combination Stock Option Plan, as       Filed
              amended.                                                herewith


---------
A.    Incorporated by reference to the Registrant's registration statement on
      Form S-1 (Registration No. 333-87296) filed on December 13, 1994.


                                      -6-

B.    Incorporated by reference to the Registrant's Form 8-A filed on January
      27, 1995.

C.    Incorporated by reference to the Registrant's Form 8-A filed on August 7,
      1997.

D.    Incorporated by reference to the Registrant's annual report on Form 10-K
      filed on December 13, 2001 for the fiscal year ending September 30, 2001.

E.    Incorporated by reference to the Registrant's current report on Form 8-K
      filed on January 19, 2000 and amended on February 14, 2000.

F.    Incorporated by reference to the Registrant's current report on Form 8-K
      filed on May 29, 2001.

G.    Incorporated by reference to the Registrant's registration statement on
      Form S-8 (Registration No. 333-67432) filed on August 13, 2001.

H.    Incorporated by reference to the Registrant's current report on Form 8-K
      filed on March 1, 2002.

I.    Incorporated by reference to the Registrant's registration statement on
      Form S-3/A filed on May 13, 2002.

* In accordance with Rule 12b-32 under the Securities Exchange Act of 1934, as
amended, reference is made to the documents previously filed with the Securities
and Exchange Commission, which documents are hereby incorporated by reference.


                                      -7-